By Order of the Secured Party of C9 Corp.
Liquidation of Scientific Equipment: ONLINE AUCTION! EQUIPMENT SOLD ABSOLUTE!
1600 Enterprise Drive, Kingston, NY —-INSPECTION BY APPOINTMENT
Liquidation of a 4th Generation Modular Advanced Atomic Layer Deposition Tool and Super-Lattice Semiconductor SIO & Si/C Technology.
TOOL DESCRIPTION: Fully Automated Vacuum Process Cluster Tool for Silicon Carbide Super Lattice Deposition on 200 mm Silicon wafers via ALD/PVD and CVD processes. Tool consists of (2) Vacuum Robot Chambers, (1) Integrated Load Lock Chamber, (1) Vacuum Extension Tunnel, (2) Rapid Thermal Processing (RTP) Modules, (1) EPI Silicon Deposition & Rapid Thermal Annealing (RTA) module, (1) Source Delivery Cabinet, (1) Power Distribution Cabinet and Controls & Power Supply Rack.
TO BE SOLD AS AN ENTIRE UNIT SUBJECT TO HIGHER BIDS FOR INDIVIDUAL UNITS
Including the following
(1) Gas Delivery System, (1) Load Lock Unit with VAT Tunnel with Varian Turbo Pump & Elevator, (1) Square Robot Handlers with Cryogenics OnBoard IS Cyropump Oerlicon SL300 Turbo Pump, (1) HEX Robot Handler Oerliconp SL300 Turbo Pump, (2) Rapid Thermal Processing Modules, (1) Power Distribution Pane, (1) Epitaxy Rapid Thermal Anneal Module with E-Beam Deposition Orelicon MAG W 600 iP Turbo Pump, (1) Power Supply Panel for Heaters with Sorenson Lxi Power Supply, Lesker M.A.P.S EBPS-A & Lesker M.A.P.S Control, E-Beam Supply & Controls, Temperature & Pyrometer, (1) Control & Power Supply Panel for RTP 1 and RTP 2, (1) Control Cabinet for Gas Delivery System, (1) Control Rack for Robotic Handlers, (1) Lot Aluminum Trusses for Electrical and Plumbing lines, (1) CTI Cryogenics IS-1000 Compressor s/n D05320852
Parts of the instrument include:
CTI Cryogenics IS 1000 Compressor
CTI Cryogenics In-board IS 8F Cryopump
Varian SH100 Mechanical Rotary Pump
MKS Vacuum Valves
VAT Gate Valves including 9400X-BA24, (2) 94012-BA14 & BA24
(6) Sorensen LXI RF Power Amplifiers
Kurt J Lesker MAPS EBPS-A | Lesker FTC 2800 | Lesker EB Control 1
ATMI Unichem 3250 Batch Fluid Chemical Supply System
Inficon Transpector 2 End Point Detection System
Precision Flow Technologies Robotic Hub
VArian Chamber Mounted Turbo Pumps
Applied Material IPUP (Alcatel A100L) Chamber Vacuum Pump
and additional items
NOTE: This unit is currently in a disassembled state and is sold “AS IS” “WHERE IS” with absolutely no warranty or guaranty of any kind, and strictly according to the Terms of Sale. Responsibility for export licenses lies solely with the purchaser. All units are on casters. Dock height loading dock at the premises.
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Online Registration, Terms of Sale, View Images and Tool
For information, technical specifications and site visit please contact:
MICHAEL SALVADORE JR SPA, MPPA 401-792-4300 x1 or by Email: Contact Us
Riggers- Truckers-Packing & Shipping Services:
Pedowitz: 718- 923-1862 http://www.pedowitz.com/contact-us/
Scopro Rigging 978-772-9472 jeanne@scoprorigging.com
Hotels:
Best Western
Marriot
Image Gallery:
Location of Tool:
